Low Aspect Ratio Structuring
In the Quantum Photonics group of Prof Imamoglu at ETH Zurich, PhD candidate Andres Vargas Lugo Cantu has developed a low cost method to create sub-micron features using standard processing techniques The trick is to deposit a dielectric layer onto a tench that is much higher than wide (low aspect ratio) Further benefits as opposed to using an e-beam system are higher device density on a wafer as well as decrease of fabrication time.
Fact sheet: external page Low AR Structuring