Low Aspect Ratio Structuring

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Low cost method to create sub-micron features - VIDEO

In the Quantum Photonics group of Prof Imamoglu at ETH Zurich, PhD candidate Andres Vargas Lugo Cantu has developed a low cost method to create sub-micron features using standard processing techniques  The trick is to deposit a dielectric layer onto a tench that is much higher than wide (low aspect ratio) Further benefits as opposed to using an e-beam  system are higher device density on a wafer as well as decrease of fabrication time.

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